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TABLE I GFC 17 LOW FLOW MASS FLOW CONTROLLER*

4.2 Flow Capacities

MODEL CODE

mL/min [N

]

CODE

liters/min [N

]

01 10 07 1

02 20 08 2

03 50 09 5

04 100 10 10

05 200

06 500

TABLE II GFC 37 MEDIUM FLOW MASS FLOW CONTROLLER*

TABLE III GFC 47/57/67/77 HIGH FLOW MASS FLOW CONTROLLER*

*Flow rates are stated for Nitrogen at STP conditions [i.e. 70

F (21.1

C) at 1 atm].

For other gases use the K factor as a multiplier from APPENDIX 2.

MODEL CODE

liters/min [N

]

30 20

31 30

32 40

33 50

MODEL

CODE

liters/min [N

]

40 60

41 80

42 100

50 200

67 60 500

77 70 1000

4.1 CE Compliance

GFC Mass Flow Controllers are in compliance with CE test standards stated

below:

EMC Compliance with 89/336/EEC as amended; Emission Standard: EN 55011:1991,

Group 1, Class B Immunity Standard: EN 55082-1:1992

FLOW RANGES

1 2 ... 7 8 9 10 11 12 13 14 15 16 17 ... 39 40

OPERATING MANUAL 1
TABLE OF CONTENTS 3
PIN FUNCTION 7
APPENDIX 1 29
COMPONENTS DIAGRAM 29
APPENDIX 3 35
DIMENSIONAL DRAWINGS 35
GFC17 MASS FLOW CONTROLLER 35
GFC37/47 MASS FLOW CONTROLLER 36
0.875 (22,2) 37
1.39 (35,3) 37
GFC67 MASS FLOW CONTROLLER 38
GFC77 MASS FLOW CONTROLLER 39
 CAUTION: 40

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